Osipov, Artem A https://orcid.org/0000-0002-0622-6479
Alexandrov, Sergey E
Iankevich, Gleb A https://orcid.org/0000-0002-1434-9807
Journal title: Materials Research Express
Article type: paper
Article title: The effect of a lithium niobate heating on the etching rate in SF6 ICP plasma
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-11-19
Date accepted: 2018-12-21
Online publication date: 2019-01-11