Mariana, Shinta https://orcid.org/0000-0002-4945-6178
Hamdana, Gerry
Dickmann, Johannes https://orcid.org/0000-0002-4700-5912
Bertke, Maik
Michel, Christophe https://orcid.org/0000-0003-0606-725X
Meyer, Jan
Yulianto, Nursidik
Cagnoli, Gianpietro
Peiner, Erwin
Waag, Andreas
Granata, Massimo https://orcid.org/0000-0003-3275-1186
Kroker, Stefanie
Wasisto, Hutomo Suryo https://orcid.org/0000-0002-4522-3625
Funding for this research was provided by:
LENA-OptoSense funded by the Lower Saxony Ministry for Science and Culture
Georg-Christoph-Lichtenberg Ph.D. scholarship
RISET-Pro by RISTEKDIKTI
NanoMet RTG 1952/1 ’Metrology for Complex Nanosystems’
German Research Foundation (PE 885/3-1)
‘Niedersächsisches Vorab’, Germany, through the Quantum- and Nanometrology (QUANOMET) initiative (Within project NP 2-2)
Journal title: Materials Research Express
Article type: paper
Article title: Fabrication of SiO2 microcantilever arrays for mechanical loss measurements
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-09-28
Date accepted: 2018-12-21
Online publication date: 2019-01-16