Funding for this research was provided by:
the Fundamental Research Funds for the Central Universities (DUT15LAB23)
the National Natural Science Foundation of China (NSFC 51272034 and NSFC 51175059)
Journal title: Materials Research Express
Article type: paper
Article title: Effects of deposition temperature on the properties of sputtered yttrium-doped hafnium oxide thin films
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-03-06
Date accepted: 2019-05-28
Online publication date: 2019-06-05