Liu, Xingyu https://orcid.org/0000-0002-9722-6844
Italiano, Joe
Scott, Robin
Nanver, Lis K https://orcid.org/0000-0003-3667-4077
Article Title: Silicon micromachining with nanometer-thin boron masking and membrane material
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd
Publication dates
Date Received: 2019-07-09
Date Accepted: 2019-10-04
Online publication date: 2019-10-18