Liu, Hongri
Li, Hongtao https://orcid.org/0000-0002-0416-4737
Jiang, Bailing https://orcid.org/0000-0003-3547-4460
Article Title: Effects of target current density on the ionization rate of deposited particles and breakdown strength of AlN films
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-01-06
Date Accepted: 2020-02-11
Online publication date: 2020-02-24