Zhou, Chao https://orcid.org/0000-0001-6842-6217
Li, Detian https://orcid.org/0000-0001-6842-6217
Zhou, Hui
Liu, Xingguang
Ma, Zhanji
Funding for this research was provided by:
National Natural Science Foundation of China (61627805)
Article Title: Influence of the sputtering glancing angle on the microstructure and adsorption characteristics of Zr-Co-RE getter films
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-01-19
Date Accepted: 2020-02-24
Online publication date: 2020-03-09