Huang, Hua
Chen, Chun-Sheng
Hu, Chih-Chung
Lee, Lian-Wang
Hsu, Chun-Yao https://orcid.org/0000-0001-7577-018X
Funding for this research was provided by:
Ministry of Science and Technology of the Republic of China (MOST 108-2628-E-005-003-MY2)
Article Title: Structure and mechanical performance for TiAlN films that are grown with a low Al composition
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-06-25
Date Accepted: 2020-07-28
Online publication date: 2020-08-07