Wang, Yanrong https://orcid.org/0000-0002-4085-3038
Li, Yongliang https://orcid.org/0000-0002-5590-861X
Cheng, Xiaohong
Wang, Hanxiang
Yao, Qide
Zhang, Jing
Liu, Wenkai
Wang, Guilei
Yan, Jiang
Wang, Wenwu
Funding for this research was provided by:
National Natural Science Foundation of China (62074160)
Scientific Research Startup Foundation of North China University of Technology
Natural Science Foundation (4202078)
Science and Technology Program of Beijing Municipal Science and Technology (Z201100004220001)
CAS Pioneer Hundred Talents Program (N.A.)
Article Title: Investigation of thermal stability of Si0.7Ge0.3Si stacked multilayer with As ion-implantation
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-03-22
Date Accepted: 2021-06-07
Online publication date: 2021-09-22