Li, Yongliang https://orcid.org/0000-0002-5590-861X
Zhao, Fei
Liu, Haoyan
Cheng, Xiaohong
Zan, Ying
Li, Junjie
Luo, Jun https://orcid.org/0000-0002-5122-6806
Wang, Wenwu
Funding for this research was provided by:
Natural Science Foundation (4202078)
National Natural Science Foundation of China (62074160)
CAS Pioneer Hundred Talents Program
Article Title: Novel Si/SiGe fin on insulator fabrication on bulk-Si substrate
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-06-19
Date Accepted: 2021-07-22
Online publication date: 2021-07-30