Lin, Wenkui https://orcid.org/0000-0002-7289-2883
Yun, Xiaofan https://orcid.org/0000-0003-4873-8445
Wang, Xiaoyi
Zeng, Zhongming https://orcid.org/0000-0001-7240-2058
Wang, Yiqun
Zhang, Xiaodong https://orcid.org/0000-0002-7528-9828
Zeng, Chunhong https://orcid.org/0000-0003-4578-7364
Zhang, Baoshun
Funding for this research was provided by:
Key R&D Program of China (2017YFA0305000)
Article Title: Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-07-22
Date Accepted: 2021-08-24
Online publication date: 2021-09-02