Funding for this research was provided by:
Inner Mongolia Autonomous Region Science and Technology Innovation Guidance Project (2017CXYD-2)
National Natural Science Foundation of China (61765012)
Key Research and Development Program of China (Key Research and Development Program of China)
Natural Science Foundation of Inner Mongolia (2019LH05003)
Article Title: Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-06-16
Date Accepted: 2021-09-07
Online publication date: 2021-09-15