Wu, Yuhou
Zhang, Huisen https://orcid.org/0000-0002-6790-8473
Yan, Guangyu https://orcid.org/0000-0003-3242-5348
Liu, Lusheng
Cristea, Daniel https://orcid.org/0000-0002-3871-1436
Wang, He
Yang, Yumiao
Shen, Jianhui
Funding for this research was provided by:
Programme of Introducing Talents of Discipline to Universities (D18017)
National Natural Science Foundation of China (51942507)
Shenyang Science and Technology Bureau (18-400-6-05)
Article Title: Hot filament chemical vapor deposition temperature field optimization for diamond films deposited on silicon nitride substrates
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-08-25
Date Accepted: 2021-10-22
Online publication date: 2021-11-11