Joo, Young-Hee https://orcid.org/0000-0002-1199-0906
Um, Doo-Seung https://orcid.org/0000-0003-4085-4580
Kim, Chang-Il
Funding for this research was provided by:
National Research Foundation (2018R1D1A1B07051429)
Article Title: Tunable physical properties of Al-doped ZnO thin films by O2 and Ar plasma treatments
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-11-08
Date Accepted: 2021-12-01
Online publication date: 2021-12-10