Wu, Zhenqing
Zhao, Jiaoling https://orcid.org/0000-0001-6733-090X
Zhu, Meiping
Guo, Sheng
Liu, Tianbao
Du, Wenyun
Shi, Jun
Zeng, Tingting
Shao, Jianda
Funding for this research was provided by:
Youth Innovation Promotion Association of the Chinese Academy of Sciences
National Natural Science Foundation of China (NSAF U1930119)
Strategic Priority Research Program of the Chinese Academy of Sciences (XDA25020206)
Article Title: Effects of film thickness and annealing temperature on the properties of molybdenum carbide films prepared using pulsed direct-current magnetron sputtering
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-12-08
Date Accepted: 2022-02-02
Online publication date: 2022-02-11