Yeo, Jin-Ho
Nam, Ki-Bong
Kang, Gil-Seon https://orcid.org/0000-0002-6893-5449
Hu, Qicheng
Jeong, Chang-Young
Park, Young-Soo
Lee, Seok Jong
Jung, Jaesun
Lee, Seung Hyun
Cho, Deok Hyun
Kim, Mun-Ja
Yoo, Ji-Beom https://orcid.org/0000-0002-3074-6685
Article Title: Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-05-09
Date Accepted: 2022-06-13
Online publication date: 2022-06-22