O’Donnell, S https://orcid.org/0000-0001-5194-0455
Snelgrove, M https://orcid.org/0000-0003-0344-1146
Shiel, K
Weiland, C
Hughes, G
Woicik, J
O’Neill, D
Jose, F
McFeely, C
O’Connor, R https://orcid.org/0000-0001-5794-6188
Funding for this research was provided by:
Sustainable Energy Authority of Ireland (18/RDD/185)
Article Title: Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-08-24
Date Accepted: 2022-10-11
Online publication date: 2022-10-21