Wei, Shasha
Xie, Renqi https://orcid.org/0009-0004-7348-5624
Li, Yuanyou https://orcid.org/0009-0006-4092-2511
Meng, Jiahao
Lin, Rongchuan
Weng, Jianchun
Li, Bo
Funding for this research was provided by:
University-Industry Cooperation Project of Fujian Province (2021H6031)
Collaborative Special Project for the Fuxia-Quan Autonomous Region (3502ZCQXT2021004)
Article Title: Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-05-28
Date Accepted: 2023-11-02
Online publication date: 2023-12-27