Lu, Kuan-Wei
Ko, Kuan-Yu
Shih, Ai-Ling
Cu, Duy Thanh
Li, Meng-Chi
Kuo, Chien-Cheng https://orcid.org/0000-0001-9683-8948
Funding for this research was provided by:
National Science and Technology Council (NSTC), Taiwan (NSTC 113-2221-E-008-047)
Article Title: The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors
Journal Title: Materials Research Express
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-01-29
Date Accepted: 2025-04-07
Online publication date: 2025-04-16