POPOVICH, A F
RALCHENKO, V G
BALLA, V K
MALLIK, A K
KHOMICH, A A
BOLSHAKOV, A P
SOVYK, D N
ASHKINAZI, E E
YUROV, V Yu
Journal title: Plasma Science and Technology
Article type: paper
Article title: Growth of 4″ diameter polycrystalline diamond wafers with high thermal conductivity by 915 MHz microwave plasma chemical vapor deposition
Copyright information: © 2017 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2016-06-09
Date accepted: 2016-10-27
Online publication date: 2017-02-21