CHEN, Jiali
JI, Peiyu
JIN, Chenggang
ZHUGE, Lanjian
WU, Xuemei
Journal title: Plasma Science and Technology
Article type: paper
Article title: The properties of N-doped diamond-like carbon films prepared by helicon wave plasma chemical vapor deposition
Copyright information: © 2018 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2018-09-10
Date accepted: 2018-11-06
Online publication date: 2018-12-13