KO, J
KIM, T H
CHOI, S
Journal title: Plasma Science and Technology
Article type: paper
Article title: Numerical analysis of thermal plasma scrubber for CF4 decomposition
Copyright information: © 2019 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2018-09-22
Date accepted: 2018-12-27
Online publication date: 2019-03-28