HAO, Zeyu
SONG, Jian
HUA, Yue
ZHANG, Gailing
BAI, Xiaodong
REN, Chunsheng
Funding for this research was provided by:
National Natural Science Foundation of China (11475038)
Journal title: Plasma Science and Technology
Article type: paper
Article title: Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source
Copyright information: © 2019 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2018-10-22
Date accepted: 2019-03-15
Online publication date: 2019-04-23