ZHANG, Xiaoxing
TIAN, Yuan
CUI, Zhaolun
TANG, Ju
Funding for this research was provided by:
State Grid Science and Technology Project (SGHB0000KXJS1800554)
National Natural Science Foundation of China (51777144)
Journal title: Plasma Science and Technology
Article type: paper
Article title: Plasma-assisted abatement of SF6 in a packed bed plasma reactor: understanding the effect of gas composition
Copyright information: © 2020 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2019-09-21
Date accepted: 2019-12-26
Online publication date: 2020-02-12