KRALKINA, Elena
NEKLIUDOVA, Polina
PAVLOV, Vladimir
VAVILIN, Konstantin
ZADIRIEV, Ilya
ZHAO, Chen
Journal title: Plasma Science and Technology
Article type: paper
Article title: Experimental study of a low-pressure hybrid RF discharge
Copyright information: © 2020 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date received: 2019-11-13
Date accepted: 2020-01-09
Online publication date: 2020-02-12