LIU, Jiankai https://orcid.org/0000-0001-7510-1699
ZHANG, Yuru
ZHAO, Kai https://orcid.org/0000-0002-9540-4643
WEN, Deqi
WANG, Younian
Funding for this research was provided by:
Fundamental Research Funds for the Central Universities (DUT20LAB201)
National Natural Science Foundation of China (11935005)
China Postdoctoral Science Foundation (2020M670741)
Natural Science Foundation of Liaoning Province (2020-MS-114)
Article Title: Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequency symmetric capacitive discharges
Journal Title: Plasma Science and Technology
Article Type: paper
Copyright Information: © 2021 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date Received: 2020-10-17
Date Accepted: 2021-01-28
Online publication date: 2021-02-26