Article Title: Study on electrostatic discharge (ESD) characteristics of ultra-thin dielectric film
Journal Title: Plasma Science and Technology
Article Type: paper
Copyright Information: © 2022 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date Received: 2021-10-08
Date Accepted: 2022-02-25
Online publication date: 2022-04-11