WANG, Minglei
ZHANG, Lin
LU, Wenqi
LIN, Guoqiang
Funding for this research was provided by:
National Key Research and Development Program of China (2016YFB0101206)
the Natural Science Foundation of the Anhui Higher Education in Institutions of China (Grant No. 2022AH050300)
Science and Technology Program of Wuhu (2021hg11)
Article Title: Plasma diagnosis of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition
Journal Title: Plasma Science and Technology
Article Type: paper
Copyright Information: © 2023 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing
Publication dates
Date Received: 2022-11-04
Date Accepted: 2023-01-12
Online publication date: 2023-03-14