Zhang, Chu-Yi
Wang, Chen
Gao, Li
Fang, Chang
Zhu, Lin
Li, Wei-Min
Wu, Di https://orcid.org/0000-0003-3619-1411
Li, Ai-Dong https://orcid.org/0000-0003-3628-0393
Funding for this research was provided by:
National Natural Science Foundation of China (51721001)
Transformation of Scientific and Technological Achievements in Jiangsu Province (BA2021028)
Article Title: Fabrication and electrical properties of flexible polymer-based MIM capacitors of high-k nanolaminate dielectrics of HfO2–SnO2–TiO2 with ultrathin Al2O3 insertion layer by plasma-enhanced atomic layer deposition
Journal Title: Flexible and Printed Electronics
Article Type: paper
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Publication dates
Date Received: 2024-08-07
Date Accepted: 2024-10-09
Online publication date: 2024-10-17