Lo, Yi-Chen https://orcid.org/0000-0003-1730-4425
Cheng, Xing
Funding for this research was provided by:
National Science Foundation (1054137)
Article Title: Polymeric sidewall transfer lithography
Journal Title: Journal of Physics Communications
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-06-29
Date Accepted: 2022-09-02
Online publication date: 2022-09-16