Anderson, Evan M https://orcid.org/0000-0002-3771-3085
Campbell, DeAnna M
Maurer, Leon N https://orcid.org/0000-0001-5015-5594
Baczewski, Andrew D
Marshall, Michael T
Lu, Tzu-Ming
Lu, Ping
Tracy, Lisa A
Schmucker, Scott W
Ward, Daniel R
Misra, Shashank
Funding for this research was provided by:
Sandia National Laboratories, Laboratory Directed Research and Development
National Nuclear Security Administration (DE-NA-0003525)
Center for Integrated Nanotechnologies
Journal title: Journal of Physics: Materials
Article type: paper
Article title: Low thermal budget high-k/metal surface gate for buried donor-based devices
Copyright information: © 2020 The Author(s). Published by IOP Publishing Ltd
License information: CC BY 4.0 Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2020-02-20
Date accepted: 2020-05-21
Online publication date: 2020-06-15