Nies, Cara-Lena https://orcid.org/0000-0003-0959-2615
Nolan, Michael https://orcid.org/0000-0002-5224-8580
Funding for this research was provided by:
Science Foundation Ireland (SFI-NSFC Partnership NITRALD (17/NSFC/5279))
Article Title: Incorporation of tungsten or cobalt into TaN barrier layers controls morphology of deposited copper
Journal Title: Journal of Physics: Materials
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-03-08
Date Accepted: 2023-06-15
Online publication date: 2023-06-30