Agarwal, Hitesh https://orcid.org/0000-0002-9418-7966
Reserbat-Plantey, Antoine https://orcid.org/0000-0002-9106-8750
Ruiz, David Barcons https://orcid.org/0000-0002-6271-2244
Soundarapandian, Karuppasamy Pandian https://orcid.org/0000-0002-9664-9095
Li, Geng
Mkhitaryan, Vahagn https://orcid.org/0000-0002-3138-8488
Osmond, Johann https://orcid.org/0000-0001-6522-4695
Lozano, Helena
Watanabe, Kenji https://orcid.org/0000-0003-3701-8119
Taniguchi, Takashi
Stepanov, Petr https://orcid.org/0000-0002-1121-3146
Koppens, Frank H L https://orcid.org/0000-0001-9764-6120
Krishna Kumar, Roshan https://orcid.org/0000-0003-0857-4466
Funding for this research was provided by:
Marie Skłodowska-Curie (665884)
European Union (820378)
Research Executive Agency
University of Manchester
ICFO
Air Force Office of Scientific Research (FA8655-23-1-7047)
United States Air Force
SGR (014431656)
DTU
ICFO, RWTH Aachen
AAP (ANR-15-IDEX-01)
ANR
Generalitat de Catalunya
Government of Spain (CEX2019-000910-S)
ERC
EXQIRAL (101131579)
ESF (RYC2022-036118-I)
Gordon and Betty Moore Foundation (726001)
Article Title: In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF6 etching
Journal Title: Journal of Physics: Materials
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-12-09
Date Accepted: 2025-08-19
Online publication date: 2025-09-10