Robinson, Zachary R https://orcid.org/0000-0002-1768-5988
Ruby, Josh https://orcid.org/0000-0003-2313-9956
Liao, Tyler
Herter, Luke
Ahmadov, Rashad https://orcid.org/0009-0000-4960-2123
Wittman, Mark D https://orcid.org/0009-0000-4951-3825
Sharpe, Matthew https://orcid.org/0000-0001-9434-5795
Woodward, Jeffrey M https://orcid.org/0000-0001-6709-2673
Michels, James H
Kozen, Alexander C https://orcid.org/0000-0002-5311-2757
Funding for this research was provided by:
National Nuclear Security Administration (DE-NA0004144)
Article Title: Development of an atomic layer deposition system for deposition of alumina as a hydrogen permeation barrier
Journal Title: Journal of Physics: Materials
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-07-02
Date Accepted: 2025-11-27
Online publication date: 2025-12-15