Patouillard, J https://orcid.org/0000-0002-1277-9221
Vaxelaire, N
Bernard, M
Gassilloud, R
Dussaigne, A
Hyot, B https://orcid.org/0000-0001-6021-9256
Cadot, S
Bernier, N
Mantoux, A
Blanquet, E
Raynaud, C
Gianesello, F
Article Title: Growth of c -axis AlN sputtered films on silicon-based substrates using 2D-TMD as nucleation layer
Journal Title: Journal of Physics: Materials
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-09-15
Date Accepted: 2026-02-12
Online publication date: 2026-02-20