Palo, Raffaele De https://orcid.org/0000-0002-3563-2206
Mur, Jaka https://orcid.org/0000-0001-9317-9836
Marš, Matevž https://orcid.org/0009-0005-6891-3839
Sfregola, Felice Alberto https://orcid.org/0009-0007-7775-9970
Patimisco, Pietro
Spagnolo, Vincenzo https://orcid.org/0000-0002-4867-8166
Ancona, Antonio
Petkovšek, Rok
Volpe, Annalisa
Funding for this research was provided by:
Ministero dell’Università e della Ricerca (P2022LMRKB)
Version of Record valid from 2026-01-16
Text and Data Mining valid from 2026-01-16
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Article Title: Femtosecond laser processing of quartz wafers for precision cutting of tuning forks
Journal Title: Journal of Physics: Photonics
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-11-04
Date Accepted: 2026-01-07
Online publication date: 2026-01-16