Poulsen, B https://orcid.org/0009-0003-6190-8485
Sabarinathan, J https://orcid.org/0000-0003-3949-6712
Funding for this research was provided by:
CMC Microsystems (MNT)
Canada Foundation for Innovation (JELF)
Natural Sciences and Engineering Research Council of Canada (PGSD)
Article Title: Post-foundry process flow for prototyping silicon optomechanical devices on multi-project wafers
Journal Title: Journal of Physics: Photonics
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-07-04
Date Accepted: 2026-01-15
Online publication date: 2026-01-28