Funding for this research was provided by:
European Union’s Horizon 2020 research and innovation programme (708106)
Article Title: Low damage ultra-low-k patterning using a high boiling point organic (HBPO) combined with NF3
Journal Title: Plasma Research Express
Article Type: paper
Copyright Information: © 2018 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-06-25
Date Accepted: 2018-08-09
Online publication date: 2018-11-27