Funding for this research was provided by:
EUROSTARS (Plasma S3tream E!12507.)
Article Title: Distributed elementary ECR microwave plasma sources supplied by solid state generators for production of large area plasmas without scale limitation: plasma density measurements and comparison with simulation
Journal Title: Plasma Research Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-04-01
Date Accepted: 2021-05-24
Online publication date: 2021-06-04