Nagata, Yutaka https://orcid.org/0000-0002-6356-2962
Harada, Tetsuo
Watanabe, Takeo
Kinoshita, Hiroo
Midorikawa, Katsumi
Article Title: At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2019 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2019-07-31
Date Accepted: 2019-08-14
Online publication date: 2019-09-05