Chen, Rong https://orcid.org/0000-0001-7371-1338
Li, Yi-Cheng
Cai, Jia-Ming
Cao, Kun https://orcid.org/0000-0001-5959-4577
Lee, Han-Bo-Ram https://orcid.org/0000-0002-0097-6738
Funding for this research was provided by:
State Key Lab of Digital Manufacturing Equipment and Technology (DMETKF2019003)
National Natural Science Foundation of China (51575217)
Article Title: Atomic level deposition to extend Moore’s law and beyond
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2020-01-31
Date Accepted: 2020-03-26
Online publication date: 2020-04-30