Chen, Yun https://orcid.org/0000-0002-4988-8894
Chen, Yanhui
Long, Junyu
Shi, Dachuang
Chen, Xin
Hou, Maoxiang
Gao, Jian
Liu, Huilong
He, Yunbo
Fan, Bi
Wong, Ching-Ping
Zhao, Ni
Funding for this research was provided by:
General Research Fund from Hong Kong Research Grants Council (14243616)
Research and Development Program of Guangdong Province (2020A0505140008)
Fund of Key-Area Research and Development Program of Guangdong Province (2018B090906002)
National Natural Science Foundation of China (51975127)
Article Title: Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2021-01-31
Date Accepted: 2021-05-10
Online publication date: 2021-05-25