Gao, Jian http://orcid.org/0000-0001-7740-5274
Luo, Xichun http://orcid.org/0000-0002-5024-7058
Fang, Fengzhou http://orcid.org/0000-0002-8716-5988
Sun, Jining http://orcid.org/0000-0003-4457-6047
Funding for this research was provided by:
National Natural Science Foundation of China (No. 52035009)
Royal Society-NSFC International Exchange Programme (IEC\NSFC\181474)
Engineering and Physical Sciences Research Council (EP/K018345/1)
Article Title: Fundamentals of atomic and close-to-atomic scale manufacturing: a review
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2021-08-19
Date Accepted: 2021-11-20
Online publication date: 2021-12-03