Zhu, Jinlong https://orcid.org/0000-0002-5723-2879
Liu, Jiamin
Xu, Tianlai
Yuan, Shuai
Zhang, Zexu
Jiang, Hao
Gu, Honggang
Zhou, Renjie
Liu, Shiyuan https://orcid.org/0000-0002-0756-1439
Funding for this research was provided by:
National Key Research and Development Program of China (2017YFF0204705)
National Natural Science Foundation of China (52130504)
National Science and Technology Major Project (2017ZX02101006-004)
Key Research and Development Plan of Hubei Province (2021BAA013)
Article Title: Optical wafer defect inspection at the 10 nm technology node and beyond
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2022-01-21
Date Accepted: 2022-04-06
Online publication date: 2022-04-21