Funding for this research was provided by:
Guangdong Provincial University Science and Technology Program (2020KTSCX119)
Shenzhen Science and Technology Programs (20200925155508001)
Article Title: Laser-induced microjet-assisted ablation for high-quality microfabrication
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2021-11-21
Date Accepted: 2022-04-10
Online publication date: 2022-04-22