Kim, Hye-Mi
Kim, Dong-Gyu
Kim, Yoon-Seo
Kim, Minseok
Park, Jin-Seong https://orcid.org/0000-0002-9070-5666
Funding for this research was provided by:
National Research Foundation of Korea (NRF-2020M3H4A3081867)
Ministry of Trade, Industry and Energy (20006400)
Article Title: Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2022-10-10
Date Accepted: 2023-01-17
Online publication date: 2023-02-03