Li, Jinxiong https://orcid.org/0000-0001-5284-9020
Chai, Gaoda https://orcid.org/0000-0002-0887-3290
Wang, Xinwei https://orcid.org/0000-0002-1191-8162
Funding for this research was provided by:
Guangdong Basic and Applied Basic Research Foundation (2020B1515120039)
Shenzhen Fundamental Research Program (GXWD20200802205241003)
National Natural Science Foundation of China (22175005)
Article Title: Atomic layer deposition of thin films: from a chemistry perspective
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2022-11-16
Date Accepted: 2023-05-24
Online publication date: 2023-06-14