Funding for this research was provided by:
Shanghai Municipal Science and Technology Major Project, the Shanghai Frontiers Science Center Program (2021-2025 No. 20)
Science and Technology Commission of Shanghai Municipality (21DZ1100500)
National Natural Science Foundation of China (61975123)
National Key Research and Development Program of China (2021YFB2802000)
Shanghai Science and Technology Innovation Action Plan (23JC1403100)
Article Title: Femtosecond laser micro/nano processing: from fundamental to applications
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2023-12-20
Date Accepted: 2024-11-18
Online publication date: 2024-12-12