Gao, Shang https://orcid.org/0000-0001-7447-3140
Wang, Haoxiang
Huang, Han
Dong, Zhigang
Kang, Renke
Funding for this research was provided by:
National Key Research and Development Program of China (2022YFB3605902)
National Natural Science Foundation of China (52375411)
Article Title: Predictive models for the surface roughness and subsurface damage depth of semiconductor materials in precision grinding
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2024-10-31
Date Accepted: 2025-01-24
Online publication date: 2025-02-06