Funding for this research was provided by:
National Key Research and Development Program of China (2020YFA0715000)
National Natural Science Foundation of China (62075081)
Natural Science Foundation of Jilin Province (20220402011GH)
Article Title: Laser micro-nano processing of optoelectronic materials
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2025-04-12
Date Accepted: 2025-09-24
Online publication date: 2025-10-15