Chen, Lijuan
Luo, Sihai https://orcid.org/0000-0001-5614-9734
Yang, Dongxu
Yuan, Qi
Zhang, Yingfang
Sun, Bai https://orcid.org/0000-0002-5840-509X
Lv, Jian
Chen, Xiaoliang
Tian, Hongmiao
Li, Xiangming
Ren, Fenggang
Lv, Yi
Maier, Stefan A
Shao, Jinyou https://orcid.org/0000-0003-2525-4587
Funding for this research was provided by:
National Natural Science Foundation of China (52025055)
Article Title: Scalable and reproducible sub-5 nm manufacturing for next-generation devices
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2025-04-10
Date Accepted: 2025-11-27
Online publication date: 2025-12-16